ULVAC爱发科

ULVAC爱发科 双动式真空角阀 双作用气缸型 VLPーSB025JH

ULVAC爱发科 双动式真空角阀 双作用气缸型 VLPーSB025JHULVAC爱发科 双动式真空角阀 双作用气缸型 VLPーSB025JH

  • 型号: VLPーSB025JH

ULVAC爱发科  双动式真空角阀  双作用气缸型  VLPーSB025JH

ULVAC爱发科  双动式真空角阀  双作用气缸型  VLPーSB025JH



ULVAC的真空阀是基于ULVAC在真空领域丰富的技术和经验开发的。从大气压到极高真空,对应广泛的需求提供丰富的系列产品。

特点

  • SUS角阀可以烘烤至150℃。

  • 连接法兰有4种类型可选择:JIS-VF,ISO-KF,ISO-K和ISO-CF。

  • 提供单动式和复动式2种。 单动式仅需要一个气动管线。

  • 不锈钢材料。 (但是,VLP-U由铁制成,VAP,VAH和VFR由铝制成。)

规格

ModelVLP-SB
Maximum allowable differential pressure on valve plate
(Positive pressure/counter pressure) MPa
0.10
Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa0.10
Plate sealO-ring
FeedthroughBellows
ActuationDouble-acting cylinder
External leak rate*1 Pa・m3/s≦1.0E-10
Internal leak rate*1 Pa・m3/s≦1.0E-10
Operating pressure range
(absolute pressure) Pa
Atm. ~ 1.0E-6
Bakeout temperature
(when stopping)*2 ℃
Body:150*3, actuation:70 (Indicator: 60)
Operating ambient temperature ℃5~70
Fluid temperature ℃5~70
Heating & cooling speed ℃/h≦30
Operating ambientNon-corrosive
FluidNon-corrosive
Compressed air to cylinder MPaG0.40 ~ 0.60
Warranted operation cycle*410,000
OrientationNo limitation
Position indicatorOptional (sell separately)
Material of major parts (Vacuum side)Stainless steel 304
Material of major parts (Atmosphere side)Stainless steel 304, Aluminum-6061 (anodized aluminum)
Bellows materialStainless steel 316L
Seal material (Vacuum side)FKM
Grease (Vacuum side)Any grease is not used
Attachment for liftingNone*5
RoHSComplied

*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3  Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200℃ (392F) and in closing position: 150℃ (302F).
*4 See instruction manual for detail.
*5  Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).


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