ULVAC爱发科 新型残留气体分析仪 BGM2-201 真空蒸发装置/真空炉用
ULVAC爱发科 新型残留气体分析仪 BGM2-201 真空蒸发装置/真空炉用 ULVAC爱发科 新型残留气体分析仪 BGM2-201 真空蒸发装置/真空炉用
- 型号: BGM2-201
ULVAC爱发科 新型残留气体分析仪 BGM2-201 真空蒸发装置/真空炉用 ULVAC爱发科 新型残留气体分析仪 BGM2-201 真空蒸发装置/真空炉用
ULVAC爱发科 新型残留气体分析仪 BGM2-201 真空蒸发装置/真空炉用
Resolution M/△M=1M(10% P.H.)
Model | BGM2-101 | BGM2-201 | BGM2-102 | BGM2-202 |
Mass filter type | Quadrupole | |||
Mass range | 1~100 amu | 1~200 amu | 1~100 amu | 1~200 amu |
Detector type | Faraday cup | EM tube Faraday cup | ||
Sensitivity | 10-7A/Pa | 4A/Pa | ||
Minimum detectable partial pressure | 10-8Pa | 10-12Pa | ||
Maximum operating pressure | 1x10-2Pa | |||
Total pressure function | Capable/10-2 〜10-5Pa | |||
One Click function | Capable /He/H2O/N2/O2/Any gas | |||
One Click leak test function | Capable | |||
Power input | DC24V±10% 50W | |||
Maximum sensor operating temperature | 120℃ (248℉ ) | |||
Maximum bakeout temperature (electronics removed) | 250℃ (482℉) | |||
Operating temperature range | 10 to 40℃ (50 to 104℉ ) | |||
Software | Qulee QCS Ver.4.2以降(Windows 8/10/11)适用 | |||
Applicable standard | CE |